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Title: A novel miniature planar gas ionization sensor based on selective growth of ZnO nanowires
Journal: Sensors and Actuators A: Physical
Author: 1. Soroush Bakhshi Sichani, Alireza Nikfarjam, Hassan Hajghassem
Year: 2019
Address: 1. MEMS & NEMS Laboratory, Faculty of New Sciences & Technologies, University of Tehran, P.O. Box 14395-1561, Tehran, 33316-196363, Iran
Abstract: In this study, a novel planar MEMS-based gas ionization sensor based on the field ionization of zinc oxide nanowires is reported. Selective and seedless ZnO nanowires have been grown directly on gold electrodes by low-cost and low-temperature hydrothermal method. Low operating voltage with fast response and recovery times have been achieved for detecting Argon, Helium, Air + %32 RH, Nitrogen, Dry Air, Oxygen, and Carbon dioxide at ambient temperature in atmospheric pressure. Sharp tips of ZnO nanowires reduce the gas breakdown voltage of different gases as shown for Helium and Argon to about 115 V, 85 V respectively due to their local electric field enhancement characteristic. Furthermore, an excellent semi linear response (about 80 V decrease in breakdown voltage) was observed by introducing 250 ppm of NH3 to pure N2 in 4 stages from 0 ppm to 1000 ppm as ammonia gas sensor. In addition, ZnO nanowires protect high conductive Au cathode and anode against sputtering and deformation due to their superior physical, chemical and mechanical properties.
Keywords: Planar gas ionization sensor, ZnO, Nanowire, MEMS, Selective growth
Application: Sensor
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URL: #https://www.sciencedirect.com/science/article/abs/pii/S0924424718315577#